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Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition 期刊论文
Surface & Coatings Technology, 2000, 卷号: 131, 期号: 1-3, 页码: 29-33
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY;  Pan Y;  Liu, MH (reprint author), Huazhong Univ Sci & Technol, Dept Elect Engn, Wuhan 430074, Hubei, Peoples R China.
Adobe PDF(198Kb)  |  收藏  |  浏览/下载：716/240  |  提交时间：2007/06/15
Simulation of ion transport in an extended electron cyclotron resonance plasma 期刊论文
Journal of Applied Physics, 2000, 卷号: 87, 期号: 3, 页码: 1070-1075
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY;  Ren ZX;  Liu, MH (reprint author), Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Anhui, Peoples R China.
Adobe PDF(101Kb)  |  收藏  |  浏览/下载：714/216  |  提交时间：2007/06/15