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Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition 期刊论文
Surface & Coatings Technology, 2000, 卷号: 131, 期号: 1-3, 页码: 29-33
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY;  Pan Y;  Liu, MH (reprint author), Huazhong Univ Sci & Technol, Dept Elect Engn, Wuhan 430074, Hubei, Peoples R China.
Adobe PDF(198Kb)  |  收藏  |  浏览/下载：720/241  |  提交时间：2007/06/15
Simulation of ion transport in an extended electron cyclotron resonance plasma 期刊论文
Journal of Applied Physics, 2000, 卷号: 87, 期号: 3, 页码: 1070-1075
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY;  Ren ZX;  Liu, MH (reprint author), Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Anhui, Peoples R China.
Adobe PDF(101Kb)  |  收藏  |  浏览/下载：715/216  |  提交时间：2007/06/15
ECR等离子体源中基本参数的数值模拟 期刊论文
核聚变与等离子体物理, 1998, 卷号: 18, 期号: 2, 页码: 36
作者:  刘明海;  胡希伟;  吴汉明
Adobe PDF(302Kb)  |  收藏  |  浏览/下载：739/186  |  提交时间：2010/05/03
Ecr等离子体  粒子模拟  离子能量分布  离子方向角分布  
Study on the ions' behavior in an electron cyclotron resonance plasma 期刊论文
Journal of Applied Physics, 1997, 卷号: 81, 期号: 12, 页码: 7734-7738
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Liu, MH (reprint author), UNIV SCI & TECHNOL CHINA,DEPT MODERN PHYS,HEFEI 230026,ANHUI,PEOPLES R CHINA.
Adobe PDF(106Kb)  |  收藏  |  浏览/下载：644/227  |  提交时间：2009/08/03
Temperature  Discharges  Energies  Reactor  
Two-dimensional fluid model simulation of bell jar top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 1, 页码: 1-6
作者:  Wu HM(吴汉明);  Yu BW;  Li M;  Yang Y;  Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA.
Adobe PDF(390Kb)  |  收藏  |  浏览/下载：606/188  |  提交时间：2009/08/03
Inductively Coupled Plasma  Simulation  Discharge  Density  
Theoretical and experimental studies of the bell-jar-top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 4, 页码: 776-785
作者:  Wu HM(吴汉明);  Yu BW;  Krishnan A;  Li M;  Yang Y;  Yan JP;  Yuan DP;  Wu, HM (reprint author), CFD RES CORP, HUNTSVILLE, AL 35805 USA.
Adobe PDF(284Kb)  |  收藏  |  浏览/下载：739/134  |  提交时间：2009/08/03
Experimental Diagnosis  Icp  2-d Modeling  Energy-distributions  Power Deposition  Langmuir Probe  Density  Discharges  Model  
Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges 期刊论文
Journal of Applied Physics, 1996, 卷号: 80, 期号: 7, 页码: 3699-3704
作者:  Yang Y;  Wu HM(吴汉明)
Adobe PDF(283Kb)  |  收藏  |  浏览/下载：660/258  |  提交时间：2009/08/03
Electron-distribution Function  Rf Discharge  Glow-discharge  Plasma Sources  
深亚微米刻蚀与等离子体源 期刊论文
中国科学基金, 1996, 期号: 1, 页码: 31
作者:  吴汉明
Adobe PDF(359Kb)  |  收藏  |  浏览/下载：379/111  |  提交时间：2009/08/03
等离子体源  亚微米刻蚀  挑战性问题  
Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma 期刊论文
Chinese Physics Letters, 1996, 卷号: 13, 期号: 6, 页码: 447-450
作者:  Yang Y;  Wu HM(吴汉明);  Yang, Y (reprint author), CHINESE ACAD SCI,INST MECH,BEIJING 100080,PEOPLES R CHINA.
Adobe PDF(237Kb)  |  收藏  |  浏览/下载：446/115  |  提交时间：2009/08/03
Discharge  
Two-dimensional simulation of inductive plasma sources with self-consistent power deposition 期刊论文
IEEE Transactions on Plasma Science, 1995, 卷号: 23, 期号: 4, 页码: 558-562
作者:  Li M;  Wu HM(吴汉明);  Chen YM
Adobe PDF(424Kb)  |  收藏  |  浏览/下载：639/252  |  提交时间：2009/08/03
Electron-cyclotron Resonance  Energy-distributions  Frequency