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Two-dimensional fluid model simulation of bell jar top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 1, 页码: 1-6
作者:  Wu HM(吴汉明);  Yu BW;  Li M;  Yang Y;  Wu, HM (reprint author), CFD RES CORP,HUNTSVILLE,AL 35805, USA.
Adobe PDF(390Kb)  |  收藏  |  浏览/下载:601/185  |  提交时间:2009/08/03
Inductively Coupled Plasma  Simulation  Discharge  Density  
Theoretical and experimental studies of the bell-jar-top inductively coupled plasma 期刊论文
IEEE Transactions on Plasma Science, 1997, 卷号: 25, 期号: 4, 页码: 776-785
作者:  Wu HM(吴汉明);  Yu BW;  Krishnan A;  Li M;  Yang Y;  Yan JP;  Yuan DP;  Wu, HM (reprint author), CFD RES CORP, HUNTSVILLE, AL 35805 USA.
Adobe PDF(284Kb)  |  收藏  |  浏览/下载:736/133  |  提交时间:2009/08/03
Experimental Diagnosis  Icp  2-d Modeling  Energy-distributions  Power Deposition  Langmuir Probe  Density  Discharges  Model  
Parameter-estimation of a spherical top inductively-coupled plasma source with global-model 期刊论文
Chinese Physics Letters, 1995, 卷号: 12, 期号: 5, 页码: 281-284
作者:  Wu HM(吴汉明);  Li M(李明);  Chen YM(陈允明);  Wu CK(吴承康);  WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
Adobe PDF(260Kb)  |  收藏  |  浏览/下载:705/170  |  提交时间:2009/08/03
The effects of coil current distribution in a cylindrical electron-cyclotron-resonance reactor 期刊论文
Chinese Physics Letters, 1994, 卷号: 11, 期号: 12, 页码: 747-750
作者:  Wu HM(吴汉明);  Graves DB;  Li M;  Wang Q;  WU, HM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
Adobe PDF(282Kb)  |  收藏  |  浏览/下载:549/156  |  提交时间:2009/08/03