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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [6]
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李帅辉 [6]
樊菁 [5]
舒勇华 [5]
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唐锦荣 [2]
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电子束物理气相沉积钇钛合金薄膜的组分和厚度分布
期刊论文
中国科学. E辑, 技术科学, 2008, 卷号: 38, 期号: 7, 页码: 1105-1117
Authors:
李帅辉
;
舒勇华
;
樊菁
Adobe PDF(665Kb)
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Submit date:2010/05/03
电子束物理气相沉积
薄膜
厚度和组分分布
蒸气原子
非平衡输运
Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition
期刊论文
Science In China Series E-Technological Sciences, 2008, 页码: 1470-1482
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Fan J(樊菁)
;
Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
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Submit date:2009/08/03
Electron Beam Physical Vapor Deposition
Thin Film
Thickness And Species Distributions
Vapor Atom
Nonequilibrium Transport
Monte-carlo-simulation
Sphere Model
Evaporation
电子束物理气相沉积中关键力学问题的数值与实验研究
学位论文
博士论文,北京: 中国科学院研究生院, 2007
Authors:
李帅辉
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Submit date:2009/04/13
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition
会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Fan J(樊菁)
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View/Download:214/53
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Submit date:2016/06/28
Electron Beam Physical Vapor Deposition
Thin Film
Thickness And Species Distributions
Vapor Atom
Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation
Sphere Model
Evaporation
Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum
会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Tang JR(唐锦荣)
;
Fan J(樊菁)
;
Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
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Submit date:2016/06/28
真空辐射加热基片的温度分布
期刊论文
力学与实践, 2006, 卷号: 28, 期号: 3, 页码: 19-23
Authors:
李帅辉
;
舒勇华
;
唐锦荣
;
樊菁
Adobe PDF(255Kb)
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View/Download:698/227
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Submit date:2007/06/15
薄膜气相沉积
真空辐射加热
基片温度分布