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Comparison of Cu thin films deposited on Si substrates with different surfaces and temperatures 期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 276, 页码: 417-423
作者:  Zhang J(张俊);  Liu C(刘崇);  Fan J(樊菁);  Zhang, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(3091Kb)  |  收藏  |  浏览/下载：859/241  |  提交时间：2013/06/27
Copper Thin Film  Deposition And Growth  Molecular Dynamics  Crystalline Structure And Orientation  
Molecular dynamics simulation of deposition and growth of cu thin film on si substrate 会议论文
28th International Symposium on Rarefied Gas Dynamics (RGD), Zaragoza, SPAIN, JUL 09-13, 2012
作者:  Zhang J(张俊);  Liu C(刘崇);  Shu YH(舒勇华);  Fan J(樊菁);  Zhang, J (reprint author), Chinese Acad Sci, State Key Lab High Temp Gas Dynam, Inst Mech, Beijing 100190, Peoples R China.
Adobe PDF(668Kb)  |  收藏  |  浏览/下载：848/202  |  提交时间：2013/02/26
Thin Film Growth  Crystalline Structure And Orientation  Surface Roughness  Molecular Dynamics  Embedded-atom Method  Surfaces  Systems  Metals  
Growth and properties of Cu thin film deposited on Si(001) substrate: A molecular dynamics simulation study 期刊论文
Applied Surface Science, 2012, 卷号: 261, 期号: 15, 页码: 690-696
作者:  Zhang J(张俊);  Liu C(刘崇);  Shu YH(舒勇华);  Fan J(樊菁);  Fan, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(1534Kb)  |  收藏  |  浏览/下载：1457/516  |  提交时间：2012/12/04
Embedded-atom Method  Epitaxial-growth  Si  Molecular Dynamics Method  Systems  Surface  Si(111)  Metals  Al  Thin Film Deposition And Growth  Crystalline Structure And Orientation  Surface Roughness  
A Breakdown Criterion of Free Molecular Flows and an Optimum Analysis of EBPVD 会议论文
26th International Symposium on Rarefied Gas Dynmaics (RGD26), Kyoto, JAPAN, JUN 20-JUL 25, 2008
作者:  Li SH(李帅辉);  Fan J(樊菁);  Shu YH(舒勇华);  Li SH
Adobe PDF(690Kb)  |  收藏  |  浏览/下载：984/145  |  提交时间：2009/07/23
Free Molecular Assumption  Breakdown Criterion  Optimization  Thin Film  Ebpvd  Physical Vapor-deposition  Yttrium  
Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition 期刊论文
Science In China Series E-Technological Sciences, 2008, 页码: 1470-1482
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁);  Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(485Kb)  |  收藏  |  浏览/下载：887/249  |  提交时间：2009/08/03
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Nonequilibrium Transport  Monte-carlo-simulation  Sphere Model  Evaporation  
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition 会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁)
浏览  |  Adobe PDF(756Kb)  |  收藏  |  浏览/下载：226/57  |  提交时间：2016/06/28
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation  Sphere Model  Evaporation