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Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si 会议论文
13th International Conference on Fracture 2013, ICF 2013, Beijing, China, June 16, 2013 - June 21, 2013
Authors:  Hu YQ;  Zhao YP(赵亚溥)
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Accelerometers  Aluminum  Glass  Nanostructures  Tensile strength  Anodic bonding  Bonding temperatures  Dendritic nanostructures  Intermediate layers  MEMS/NEMS  Micro accelerometers  Micro  scale structures  Quasi  static loading  
Flexural contact in MEMS stiction 期刊论文
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2012, 卷号: 49, 期号: 17, 页码: 2203-2214
Authors:  Zhang, Yin;  Zhao, Ya-pu;  Zhang, Y;  Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
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Stiction  Contact Mechanics  Mems  Adhesion  Arc-shape  S-shape  
A precise model for the shape of an adhered microcantilever 期刊论文
Sensors and Actuators A-Physical, 2011, 卷号: 171, 期号: 2, 页码: 381-390
Authors:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
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Stiction  Microcantilever  Adhesion  Arc-shape  S-shape  Finite Beam  Adhesion  Stiction  Mems  Contact  Force  Cantilevers  Foundation  Mechanics  Work  
Pyrex玻璃/铝多层阳极键合界面结构与力学分析 期刊论文
功能材料, 2008, 卷号: 39, 期号: 9, 页码: 1466-1469
Authors:  鲁晓莹;  刘翠荣;  孟庆森;  杨振宇;  赵亚溥
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阳极键合    Pyrex玻璃  力学特征  Mems  
Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film 会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao YP
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Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
Pull-In Instability Of Micro-Switch Actuators: Model Review 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 175-183
Authors:  Lin WH(林文惠);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Pull-in  Micro And Nano-switches  Error Estimation  Theoretical Models  Nanoscale Electrostatic Actuators  Van-der-waals  Variational Iteration Method  Rf Mems Switches  Torsional Actuators  Microelectromechanical Systems  Behavior  Parameters  Stability  Forces  
Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film 期刊论文
Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing, 2008, 页码: 611-616
Authors:  Hu YQ(胡宇泉);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 315-322
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
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Fractal Pattern  Dla  Anodic Bonding  Aluminum Interlayer  Mems  Diffusion-limited Aggregation  Ion Drift Processes  Borosilicate Glass  Depletion  Films  Si  
Stability and bifurcation behaviour of electrostatic torsional NEMS varactor influenced by dispersion forces 期刊论文
Journal of Physics D-Applied Physics, 2007, 卷号: 40, 期号: 6, 页码: 1649-1654
Authors:  Lin WH(林文惠);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
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Van-der-waals  Pull-in Parameters  Microelectromechanical Systems  Casimir Force  Actuators  Mems  Instability  Adhesion  Switches  
Casimir Effect on the Pull-in Parameters of Nanometer Switches 期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 80-85
Authors:  Lin WH(林文惠);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China.
Adobe PDF(284Kb)  |  Favorite  |  View/Download:434/138  |  Submit date:2007/06/15
Microelectromechanical Systems  Elastic Films  Mems  Force  Actuators  Stability  Stiction  Adhesion  Model