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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(1... [26]
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杨业敏 [26]
张泰华 [17]
郇勇 [8]
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A moving-coil designed micro-mechanics tester with application on MEMS
期刊论文
Measurement Science & Technology, 2007, 卷号: 18, 期号: 11, 页码: 3612-3616
Authors:
Huan Y(郇勇)
;
Zhang TH(张泰华)
;
Yang YM(杨业敏)
;
Zhang, TH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China.
Adobe PDF(557Kb)
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Submit date:2009/08/03
Micro-mechanics
Tester
Design
Mems
Thin-films
Mechanical-properties
Nanoindentation Technique
In-plane Load Measuring Technique for the Strength Test of MEMS Micro-cantilever
期刊论文
Chinese Science Bulletin, 2006, 卷号: 51, 期号: 23, 页码: 2819-2823
Authors:
Huan Y(郇勇)
;
Zhang TH(张泰华)
;
Yang YM(杨业敏)
;
Huan, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Submit date:2007/06/15
微力学测试仪在MEMS键合强度测试中的应用
期刊论文
机械强度, 2005, 卷号: 27, 期号: 3, 页码: 331-334
Authors:
郇勇
;
张泰华
;
杨业敏
;
阮勇
;
张大成
Adobe PDF(190Kb)
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View/Download:1075/382
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Submit date:2007/06/15
微电子机械系统
键合
微悬臂梁
强度
电磁式微加速度计冲击校准装置
专利
发明专利. 电磁式微加速度计冲击校准装置, 专利号: ZL02291092.1, 申请日期: 2002-12-26, 授权日期: 2012-12-28
Inventors:
张泰华
;
郇勇
;
杨业敏
Adobe PDF(325Kb)
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Submit date:2012/12/28
Micro/Nanomechanical and Tribological Properties of thin Diamond-Like Carbon Coatings
期刊论文
Chinese Journal of Aeronautics, 2003, 卷号: 16, 期号: 1, 页码: 47-51
Authors:
Zhang TH(张泰华)
;
Liu DX
;
Huan Y(郇勇)
;
Yang YM(杨业敏)
Adobe PDF(267Kb)
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Submit date:2007/06/15
Diamond-like Carbon s Microhardness
Nanoindentation
Nanoscratch
Solid Lubricating
压阻式高量程微加速度计的冲击校准
期刊论文
传感器技术, 2003, 卷号: 22, 期号: 11, 页码: 78-80
Authors:
郇勇
;
张泰华
;
杨业敏
;
王钻开
;
陆德仁
Adobe PDF(164Kb)
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Submit date:2007/06/15
微电子机械系统
微加速度计
Hopkinson杆
校准
氮化钛沉积膜的摩擦性能研究
期刊论文
摩擦学学报, 2003, 卷号: 23, 期号: 5, 页码: 367-370
Authors:
张泰华
;
郇勇
;
杨业敏
Adobe PDF(234Kb)
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Submit date:2007/06/15
氮化钛薄膜
显微硬度
纳米压痕
纳米划痕
摩擦性能
用Hopkinson杆冲击加载研究高量程微加速度计芯片的抗过载能力
期刊论文
传感技术学报, 2003, 卷号: 16, 期号: 2, 页码: 128-131
Authors:
郇勇
;
张泰华
;
杨业敏
;
曾昭君
Adobe PDF(143Kb)
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Submit date:2007/06/15
微加速度计
Hopkinson
杆
抗过载能力
纳米硬度技术在表面工程力学性能检测中的应用
期刊论文
中国机械工程, 2002, 卷号: 13, 期号: 24, 页码: 2148-2151
Authors:
张泰华
;
杨业敏
Adobe PDF(407Kb)
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View/Download:1291/405
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Submit date:2010/05/03
纳米压痕硬度
纳米划痕硬度
力学性能
表面工程
MEMS材料力学性能的测试技术
期刊论文
力学进展, 2002, 卷号: 32, 期号: 4, 页码: 545-562
Authors:
张泰华
;
杨业敏
;
赵亚溥
;
白以龙
Adobe PDF(1600Kb)
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View/Download:1530/531
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Submit date:2010/05/03
微电子机械系统
力学性能
纳米压痕/划痕
弯曲
拉伸
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