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Stiction of flexural MEMS structures 会议论文
3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012, Guangxi, China, AUG 01-02, 2012
作者:  Liu Y;  Zhang Y(张吟)
浏览  |  Adobe PDF(307Kb)  |  收藏  |  浏览/下载:708/227  |  提交时间:2013/02/26
Adhesion  Boundary Conditions  Composite Micromechanics  Manufacture  Stiction  Variational Techniques  Beam Bending  Beam Deflection  Beam Length  Constraint Conditions  Contact Areas  Contact Separation  Elastic Energy  External Loads  Matching Condition  Mems-structure  Micro-cantilevers  Microcantilever Beams  Principle Of Virtual Work  Rayleigh-ritz Methods  s Shape  S-shaped  Significant Impacts  Variational Methods  
A new type of Bio-Chemical sensor based on SPM 会议论文
1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, January 18, 2006 - January 21, 2006
作者:  Zhao HB;  Ren Q(任权);  Lin YS;  Zuo YS;  Han L
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Bio Chemical Sensors  Biological Molecules  Dna Molecules  Electrical Signalling  International Conferences  Micro Cantilevers  Molecular Systems  Phosphate Buffered Saline (Pbs) Solution