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Rotating compensator sampling for spectroscopic imaging ellipsometry 会议论文
5th International Conference on Spectroscopic Ellipsometry, Albany, NY, MAY 23-29, 2010
Authors:  Meng YH(孟永宏);  Jin G(靳刚);  Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Adobe PDF(328Kb)  |  Favorite  |  View/Download:836/226  |  Submit date:2012/04/01
Rotating Compensator  Spectroscopic Imaging Ellipsometry  Spectroscopic Ellipsometry  Imaging Ellipsometry  Ellipsometry  Nanofilm Pattern  
Rotating compensator sampling for spectroscopic imaging ellipsometry 期刊论文
Thin Solid Films, 2011, 卷号: 519, 期号: 9, 页码: 2742-2745
Authors:  Meng YH(孟永宏);  Jin G(靳刚);  Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Adobe PDF(328Kb)  |  Favorite  |  View/Download:481/115  |  Submit date:2012/04/01
Rotating Compensator  Spectroscopic Imaging Ellipsometry  Spectroscopic Ellipsometry  Imaging Ellipsometry  Ellipsometry  Nanofilm Pattern  Microellipsometry  Design  Layers