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Parameter-estimation of a spherical top inductively-coupled plasma source with global-model 期刊论文
Chinese Physics Letters, 1995, 卷号: 12, 期号: 5, 页码: 281-284
Authors:  Wu HM(吴汉明);  Li M(李明);  Chen YM(陈允明);  Wu CK(吴承康);  WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
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