Fabrication and Properties of Sb-Doped ZnO thin Films Grown by Radio Frequency (RF) Magnetron Sputtering

doi:10.1016/j.jcrysgro.2006.01.022

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	Fabrication and Properties of Sb-Doped ZnO thin Films Grown by Radio Frequency (RF) Magnetron Sputtering
	Wang P; Chen NF(陈诺夫); Yin ZG; Yang F; Peng CT; Wang, P (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
发表期刊	Journal of Crystal Growth
	2006
卷号	290 期号:1 页码:56-60
ISSN	0022-0248
摘要	Sb-doped and undoped ZnO thin films were deposited on Si (100) substrates by radio frequency (RF) magnetron sputtering. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analyses revealed that all the films had polycrystalline wurtzite structure and c-axis preferred orientation. Room temperature Hall measurements showed that the as-grown films were n-type and conducting (rho similar to 1-10 Omega cm). Annealing in a nitrogen ambient at 400 degrees C for 1 h made both samples highly resistive (rho > 10(3) Omega cm). Increasing the annealing temperature up to 800 C, the resistivity of the ttndoped ZnO film decreased gradually, but it increased for the Sb-doped ZnO film. In the end, the Sb-doped ZnO film annealed at 800 C became semi-insulating with a resistivity of 10(4)Omega cm. In addition, the effects of annealing treatment and Sb-doping on the structural and electrical properties are discussed.
学科领域	力学
DOI	10.1016/j.jcrysgro.2006.01.022
收录类别	SCI
语种	英语
WOS记录号	WOS:000236656600010
关键词[WOS]	P-TYPE ZNO ; SPRAY-PYROLYSIS ; ZINC-OXIDE
WOS研究方向	Crystallography ; Materials Science ; Physics
WOS类目	Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
引用统计	被引频次：26[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/15335
专题	力学所知识产出(1956-2008)
通讯作者	Wang, P (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Wang P,Chen NF,Yin ZG,et al. Fabrication and Properties of Sb-Doped ZnO thin Films Grown by Radio Frequency (RF) Magnetron Sputtering[J]. Journal of Crystal Growth,2006,290,1,:56-60.
APA	Wang P,陈诺夫,Yin ZG,Yang F,Peng CT,&Wang, P .(2006).Fabrication and Properties of Sb-Doped ZnO thin Films Grown by Radio Frequency (RF) Magnetron Sputtering.Journal of Crystal Growth,290(1),56-60.
MLA	Wang P,et al."Fabrication and Properties of Sb-Doped ZnO thin Films Grown by Radio Frequency (RF) Magnetron Sputtering".Journal of Crystal Growth 290.1(2006):56-60.

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