Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications

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	Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications
	张吟
发表期刊	Journal of Micromechanics and Microengineering
	2007
卷号	17 期号:4 页码:753-762
ISSN	0960-1317
其他摘要	The close form solutions of deflections and curvatures for a film–substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film–substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film–substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film–substrate composite structure with the presence of gradient stress.
学科领域	力学
收录类别	其他
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/16396
专题	力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	张吟. Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications[J]. Journal of Micromechanics and Microengineering,2007,17,4,:753-762.
APA	张吟.(2007).Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications.Journal of Micromechanics and Microengineering,17(4),753-762.
MLA	张吟."Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications".Journal of Micromechanics and Microengineering 17.4(2007):753-762.

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