Electromechanical Model of RF MEMS Switches

doi:10.1007/s00542-002-0250-2

IMECH-IR > 力学所知识产出(1956-2008)

	Electromechanical Model of RF MEMS Switches
	Zhang LX(张立宪); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
	2003
卷号	9 期号:6-7 页码:420-426
ISSN	0946-7076
摘要	With the recent rapid growth of Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) switches, there has developed an emergent requirement for more accurate theoretical models to predict their electromechanical behaviors. Many parameters exist in the analysis of the behavior of the switch, and it is inconvenient for further study. In this paper, an improved model is introduced, considering simultaneously axial stress, residual stress, and fringing-field effect of the fixed-fixed bridge structure. To avoid any unnecessary repetitive model tests and numerical simulation for RF MEMS switches, some dimensionless numbers are derived by making governing equation dimensionless. The electromechanical behavior of the fixed-fixed bridge structure of RF MEMS switches is totally determined by these dimensionless numbers.
学科领域	力学
DOI	10.1007/s00542-002-0250-2
收录类别	SCI
语种	英语
WOS记录号	WOS:000186039000008
关键词[WOS]	DYNAMIC PLASTIC RESPONSE
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
引用统计	被引频次：97[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/16461
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang LX,Zhao YP,Zhao, YP . Electromechanical Model of RF MEMS Switches[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2003,9,6-7,:420-426.
APA	张立宪,赵亚溥,&Zhao, YP .(2003).Electromechanical Model of RF MEMS Switches.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,9(6-7),420-426.
MLA	张立宪,et al."Electromechanical Model of RF MEMS Switches".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 9.6-7(2003):420-426.

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