Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet

doi:10.1016/S0925-9635(00)00286-7

IMECH-IR > 力学所知识产出(1956-2008)

	Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet
	Pan WX(潘文霞); Lv FX(吕反修); Tang WZ(唐伟忠); Zhong GF(钟国仿); Jiang Z(蒋政); Wu CK(吴承康); Pan, WX (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China.
发表期刊	Diamond and Related Materials
	2000
卷号	9 期号:9-10 页码:1682-1686
ISSN	0925-9635
摘要	A new DC plasma torch in which are jet states and deposition parameters can be regulated over a wide range has been built. It showed advantages in producing stable plasma conditions at a small gas flow rate. Plasma jets with and without magnetically rotated arcs could be generated. With straight are jet deposition, diamond films could be formed at a rate of 39 mu m/h on Mo substrates of Phi 25 mm, and the conversion rate of carbon in CH4 to diamond was less than 3%. Under magnetically rotated conditions, diamond films could be deposited uniformly in a range of Phi 40 mm at 30 mu m/h, with a quite low total gas flow rate and high carbon conversion rate of over 11%. Mechanisms of rapid and uniform deposition of diamond films with low gas consumption and high carbon transition efficiency are discussed.
学科领域	力学
DOI	10.1016/S0925-9635(00)00286-7
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000089203100025
关键词[WOS]	CHEMICAL-VAPOR-DEPOSITION
WOS研究方向	Materials Science
WOS类目	Materials Science, Multidisciplinary
引用统计	被引频次：11[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/16682
专题	力学所知识产出(1956-2008)
通讯作者	Pan, WX (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Pan WX,Lv FX,Tang WZ,et al. Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet[J]. Diamond and Related Materials,2000,9,9-10,:1682-1686.
APA	潘文霞.,吕反修.,唐伟忠.,钟国仿.,蒋政.,...&Pan, WX .(2000).Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet.Diamond and Related Materials,9(9-10),1682-1686.
MLA	潘文霞,et al."Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet".Diamond and Related Materials 9.9-10(2000):1682-1686.

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