IMECH-IR  > 力学所知识产出(1956-2008)
Effects of superimposed pulse bias on TiN coating in cathodic arc deposition
Li ZY(李正阳); Zhu WB(朱武飚); Zhang Y(张勇); Li GY(李桂英); Cao EY(曹尔妍); Li, ZY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China.
2000
发表期刊Surface & Coatings Technology
卷号131期号:1-3页码:158-161
ISSN0257-8972
摘要Orthogonal designs are used to investigate the main factors when doing experiments in which pulse bias is superimposed on d.c. bias during cathodic are deposition of TiN. Pulse peak, duty cycle, frequency, direct voltage, are current and pressure all are investigated when coating TiN on HSS substrates. Roughness, surface micrograph, microhardness and thickness are tested. By analysis of variance, it is shown that pressure and frequency are the main factors. R-a and droplet density of the film with (d.c. + pulse) bias decrease. A simple explanation for the result is suggested.
学科领域力学
收录类别SCI
语种英语
WOS记录号WOS:000165548200032
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Coatings & Films ; Physics, Applied
引用统计
被引频次:23[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://dspace.imech.ac.cn/handle/311007/16804
专题力学所知识产出(1956-2008)
通讯作者Li, ZY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China.
推荐引用方式
GB/T 7714
Li ZY,Zhu WB,Zhang Y,et al. Effects of superimposed pulse bias on TiN coating in cathodic arc deposition[J]. Surface & Coatings Technology,2000,131(1-3):158-161.
APA 李正阳,朱武飚,张勇,李桂英,曹尔妍,&Li, ZY .(2000).Effects of superimposed pulse bias on TiN coating in cathodic arc deposition.Surface & Coatings Technology,131(1-3),158-161.
MLA 李正阳,et al."Effects of superimposed pulse bias on TiN coating in cathodic arc deposition".Surface & Coatings Technology 131.1-3(2000):158-161.
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