Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film

doi:10.1016/j.msea.2006.09.155

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	Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film
	Hu YQ(胡宇泉); Zhao YP(赵亚溥); Yu TX(余同希); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing
	2008
页码	611-616
ISSN	0921-5093
摘要	Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.
关键词	Anodic Bonding Dendritic Nanostructures Aluminum Thin Film Depletion Layer Mems Ion Drift Processes Borosilicate Glass Depletion
DOI	10.1016/j.msea.2006.09.155
收录类别	SCI
语种	英语
WOS记录号	WOS:000256071100154
关键词[WOS]	ION DRIFT PROCESSES ; BOROSILICATE GLASS ; DEPLETION
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
引用统计	被引频次：15[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25564
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP,Yu TX,et al. Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film[J]. Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing,2008:611-616.
APA	胡宇泉,赵亚溥,余同希,&Zhao, YP .(2008).Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film.Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing,611-616.
MLA	胡宇泉,et al."Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film".Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing (2008):611-616.

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