Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications

doi:10.1088/0960-1317/17/4/012

IMECH-IR > 力学所知识产出(1956-2008)

	Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications
	Zhang Y(张吟); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
发表期刊	Journal of Micromechanics and Microengineering
	2007
卷号	17 期号:4 页码:753-762
ISSN	0960-1317
摘要	The close form solutions of deflections and curvatures for a film-substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film-substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film-substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film-substrate composite structure with the presence of gradient stress.
关键词	Thin-films Micromachined Beams Residual-stress Cantilever Beam Stoney Formula Surface Stress Strain Bilayer Systems Model
DOI	10.1088/0960-1317/17/4/012
收录类别	SCI
语种	英语
WOS记录号	WOS:000245434200018
关键词[WOS]	THIN-FILMS ; MICROMACHINED BEAMS ; RESIDUAL-STRESS ; CANTILEVER BEAM ; STONEY FORMULA ; SURFACE STRESS ; STRAIN ; BILAYER ; SYSTEMS ; MODEL
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
引用统计	被引频次：10[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/34009
专题	力学所知识产出(1956-2008)
通讯作者	Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang Y,Zhang, Y . Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications[J]. Journal of Micromechanics and Microengineering,2007,17,4,:753-762.
APA	张吟,&Zhang, Y .(2007).Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications.Journal of Micromechanics and Microengineering,17(4),753-762.
MLA	张吟,et al."Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications".Journal of Micromechanics and Microengineering 17.4(2007):753-762.

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