IMECH-IR  > 先进制造工艺力学重点实验室
Characterization of Cr doped diamond-like carbon films and research on mechanical properties
Fan YY(范有余); Li G(李光); Xia Y(夏原); Fan, YY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China.
Source PublicationMATERIALS SCIENCE AND NANOTECHNOLOGY I
2013
Pages523-526
Conference NameInternational Conference on Materials Science and Nanotechnology (ICMSN 2012)
Conference DateNOV 16-18, 2012
Conference PlaceGuangzhou, PEOPLES R CHINA
AbstractDiamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties. The internal compressive stress affects their adhesion and preventing wide usage of these films. Metal-containing DLC films are expected to relax internal stress. The present work focused on the synthesis, chemical bond and mechanical property characterization of Cr-containing DLC films. The films thickness, internal stress and composition were characterized by scanning electron microscopy, optical interferometry and X-ray photoelectron spectroscopy respectively. Incorporation of Cr into DLC causes an initial internal stress reduction and subsequent stabilization around 0.5 GPa. The hardness behavior was found to depend on Cr content. Films with less than 7.36 at.% Cr (no formation of C-Cr bond) showed a dramatically hardness reduction compared to pure DLC films. Above 7.36 at.% Cr (C-Cr bond formed) the hardness increases above 12 GPa.
KeywordCr-dlc Films Internal Stress Nanohardness x Ray Photoelectron Spectroscopy
WOS IDWOS:000316642300115
DepartmentMAM镀层工艺力学与摩擦学
ISBN978-3-03785-525-6
URL查看原文
Indexed ByCPCI-S ; EI
Language英语
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/46845
Collection先进制造工艺力学重点实验室
Corresponding AuthorFan, YY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China.
Recommended Citation
GB/T 7714
Fan YY,Li G,Xia Y,et al. Characterization of Cr doped diamond-like carbon films and research on mechanical properties[C]:TRANS TECH PUBLICATIONS LTD,2013:523-526.
Files in This Item: Download All
File Name/Size DocType Version Access License
IMCAS-Conf2013-001.p(979KB)会议论文 开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Fan YY(范有余)]'s Articles
[Li G(李光)]'s Articles
[Xia Y(夏原)]'s Articles
Baidu academic
Similar articles in Baidu academic
[Fan YY(范有余)]'s Articles
[Li G(李光)]'s Articles
[Xia Y(夏原)]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Fan YY(范有余)]'s Articles
[Li G(李光)]'s Articles
[Xia Y(夏原)]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: IMCAS-Conf2013-001.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.