Characterization of Cr doped diamond-like carbon films and research on mechanical properties

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	Characterization of Cr doped diamond-like carbon films and research on mechanical properties
	Fan YY(范有余); Li G(李光); Xia Y(夏原); Fan, YY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China.
会议录名称	MATERIALS SCIENCE AND NANOTECHNOLOGY I
	2013
页码	523-526
会议名称	International Conference on Materials Science and Nanotechnology (ICMSN 2012)
会议日期	NOV 16-18, 2012
会议地点	Guangzhou, PEOPLES R CHINA
摘要	Diamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties. The internal compressive stress affects their adhesion and preventing wide usage of these films. Metal-containing DLC films are expected to relax internal stress. The present work focused on the synthesis, chemical bond and mechanical property characterization of Cr-containing DLC films. The films thickness, internal stress and composition were characterized by scanning electron microscopy, optical interferometry and X-ray photoelectron spectroscopy respectively. Incorporation of Cr into DLC causes an initial internal stress reduction and subsequent stabilization around 0.5 GPa. The hardness behavior was found to depend on Cr content. Films with less than 7.36 at.% Cr (no formation of C-Cr bond) showed a dramatically hardness reduction compared to pure DLC films. Above 7.36 at.% Cr (C-Cr bond formed) the hardness increases above 12 GPa.
关键词	Cr-dlc Films Internal Stress Nanohardness x Ray Photoelectron Spectroscopy
WOS记录号	WOS:000316642300115
课题组名称	MAM镀层工艺力学与摩擦学
ISBN号	978-3-03785-525-6
URL	查看原文
收录类别	CPCI-S ; EI
语种	英语
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/46845
专题	先进制造工艺力学实验室
通讯作者	Fan, YY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China.
推荐引用方式 GB/T 7714	Fan YY,Li G,Xia Y,et al. Characterization of Cr doped diamond-like carbon films and research on mechanical properties[C]MATERIALS SCIENCE AND NANOTECHNOLOGY I,2013:523-526.

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