The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry | |
Saad, A; Jiang, Y; Liu YW(刘曰武); Wang, Z; Saad, A (reprint author), Beijing Inst Technol, Sch Optoelect, Beijing 100081, Peoples R China. | |
发表期刊 | OPTICS AND LASERS IN ENGINEERING |
2014-05 | |
卷号 | 56页码:169-172 |
ISSN | 0143-8166 |
摘要 | The measurement of the diameter change of a piezoelectric transducer (PZT) cylinder with the white-light interferometry is proposed and experimentally demonstrated. One arm of a Mach-Zehnder interferometer (MZI) is wrapped on the PZT cylinder, and the phase change of the interferogram of the MZI is used to determine the diameter change when a DC voltage is applied on the PZT cylinder. The Fourier transform white-light interferomety is used for recovering the phase change of the interferometer. The experimental results show that the diameter change resolution of 0.8 nm for the PZT cylinder with diameter of 40 mm is achieved. (C) 2014 Elsevier Ltd. All rights reserved. |
关键词 | Piezoelectric Transducer Mach-zehnder Interferometer White Light Interferometry Fourier Transform Optical Path Difference |
学科领域 | Optics |
URL | 查看原文 |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000331674300020 |
项目资助者 | This work was supported by Natural Scientific Foundation of China (51075037), National Sci and Tech Key Project of China (2011ZX05038003), and the Doctoral Foundation of Education Ministry of China (20101101110014). |
课题组名称 | LMFS水环境流体力学(LEM) |
论文分区 | 二类/Q2 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://dspace.imech.ac.cn/handle/311007/48763 |
专题 | 流固耦合系统力学重点实验室 |
通讯作者 | Saad, A (reprint author), Beijing Inst Technol, Sch Optoelect, Beijing 100081, Peoples R China. |
推荐引用方式 GB/T 7714 | Saad, A,Jiang, Y,Liu YW,et al. The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry[J]. OPTICS AND LASERS IN ENGINEERING,2014,56:169-172. |
APA | Saad, A,Jiang, Y,Liu YW,Wang, Z,&Saad, A .(2014).The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry.OPTICS AND LASERS IN ENGINEERING,56,169-172. |
MLA | Saad, A,et al."The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry".OPTICS AND LASERS IN ENGINEERING 56(2014):169-172. |
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