The 29th International Symposium on Rarefied Gas Dynamics
会议日期
2014-07-13
会议地点
中国陕西西安
摘要
YBa2Cu3O7-deltaprecursor films are deposited on 2" LaAlO3wafer by the co-evaporation technique using Y, BaF2and Cu as evaporation sources. After deposition, the films are annealed at low-pressure atmosphere with the composition of oxygen and water vapour. Compared with the normal pressure annealing, it is shown that low pressure can greatly improve the superconducting properties of 2" YBCO films with thickness larger than 500 nm, as the microcrack on films surface becomes unobservable the microwave surface resistance is greatly reduced. Furthermore, it is also revealed that the optimal processing window for making high quality superconducting YBCO films through ex-situ process is relatively small, therefore the ambient in annealing furnace is crucial important and should be precisely controlled.
Wang LH,Liu C,Fan J. YBa 2Cu 3O 7-delta superconducting films prepared by low pressure post-annealing[C]Proceedings of 29th International Symposium on Rarefied Gas Dynamics/AIP Conference Proceedings, v.1631,2014.
修改评论