Multi-scale indentation model of stiff film-compliant substrate structures

doi:10.1016/j.apm.2023.02.035

IMECH-IR > 非线性力学国家重点实验室

	Multi-scale indentation model of stiff film-compliant substrate structures
	Liu, Yanwei ; Ma HS(马寒松); Long, Hao ; Wei, Shiyuan ; Zhang, Siyuan ; Wei, Yueguang
发表期刊	APPLIED MATHEMATICAL MODELLING
	2023-06
卷号	119 页码:566-585
ISSN	0307-904X
摘要	As critical components or platforms, stiff film-compliant substrate structures are widely used in micro-electro-mechanical systems (MEMS) and other devices, in which their in-dentation behavior plays an important role. In this work, a multi-scale indentation model (MSI) for stiff film-compliant substrate structures is established based on the strain gradi-ent theory and the surface elastic model. With this model, the indentation size effect of the structure is investigated from three aspects: the load-depth relationship, the distribu-tion of bending moments in the film, and the surface morphology. The results show that the indentation size effect is mainly caused by the characteristic length and the surface residual stress of the film, and it is sensitive to the modulus ratio of the film to the sub-strate but has little relation with Poisson's ratio and the contact radius. Based on the above analysis, two dimensionless numbers are proposed to evaluate the indentation size effect of stiff film-compliant substrate structures. Besides, the predicted bending stiffness by the theoretical model is consistent with the experimental result, which verifies the effective-ness of the MSI model. Our research sheds light on the understanding of the indentation size effect of stiff film-compliant substrate structures and provides theoretical guidance for the design of related devices. (c) 2023 Elsevier Inc. All rights reserved.
关键词	Multi -scale indentation model Stiff film -compliant substrate structures Strain gradient theory Surface elastic model Size effect
DOI	10.1016/j.apm.2023.02.035
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000971337900001
项目资助者	Postdoctoral Science Foundation of China for Innovative Talents [BX20220 0 08] ; National Natural Science Foundation of China [11890681, 12032001, 11521202, 12202007]
论文分区	一类
力学所作者排名	2
RpAuthor	Wei, YG
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/92237
专题	非线性力学国家重点实验室
作者单位	1.(Liu Yanwei, Long Hao, Wei Yueguang) Peking Univ Coll Engn Dept Mech & Engn Sci B ESAT Beijing 100871 Peoples R China 2.(Ma Hansong) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech Beijing 100190 Peoples R China 3.(Wei Shiyuan) Peking Univ Coll Engn Dept Biomed Engn Beijing 100871 Peoples R China 4.(Wei Shiyuan) Peking Univ China Acad Adv Interdisciplinary Studies Beijing 100871 Peoples R China 5.(Zhang Siyuan) Univ Shanghai Sci & Technol Sch Mech Engn Shanghai 200093 Peoples R China
推荐引用方式 GB/T 7714	Liu, Yanwei,Ma HS,Long, Hao,et al. Multi-scale indentation model of stiff film-compliant substrate structures[J]. APPLIED MATHEMATICAL MODELLING,2023,119:566-585.
APA	Liu, Yanwei,马寒松,Long, Hao,Wei, Shiyuan,Zhang, Siyuan,&Wei, Yueguang.(2023).Multi-scale indentation model of stiff film-compliant substrate structures.APPLIED MATHEMATICAL MODELLING,119,566-585.
MLA	Liu, Yanwei,et al."Multi-scale indentation model of stiff film-compliant substrate structures".APPLIED MATHEMATICAL MODELLING 119(2023):566-585.

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