The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness

doi:10.1016/j.rinp.2023.106483

IMECH-IR > 非线性力学国家重点实验室

	The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness
	Wei CX(卫晨曦); Zhang Y(张吟)
发表期刊	RESULTS IN PHYSICS
	2023-07
卷号	49 页码:106483
ISSN	2211-3797
摘要	The shift of resonant frequency due to the particle adsorption is the mass sensing mechanism of a micro/nano-resonator. The sensitivity and resolution are the two key performance indicators of a mass resonator. An effective method to significantly enhance the sensitivity of a mass resonator is presented. The method is realized by the design of the beam resonator thickness variation along the longitudinal direction. The analytical expression of the non-uniform resonator sensitivity and the optimization process on the thickness are given. The optimal shapes of the cantilevered and doubly clamped beam resonators are obtained by the optimization process. The sensitivities of the beam resonators in the optimal shapes are three orders of magnitude higher than those of the uniform ones. A systematic method of enhancing the sensitivity of a mass resonator through the shape optimi-zation is thus provided. The influences of the axial load on the optimization results are also discussed.
关键词	Mass resonator Sensitivity Shape optimization Resonant frequency Beam Variable thickness
DOI	10.1016/j.rinp.2023.106483
收录类别	SCI
语种	英语
WOS记录号	WOS:000988956000001
项目资助者	National Natural Science Foundation of China [11772335] ; Ministry of Science and Tech- nology of China [2022YFE0124700]
论文分区	二类
力学所作者排名	1
RpAuthor	Zhang, Y
引用统计
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/92280
专题	非线性力学国家重点实验室
作者单位	1.(Wei Chenxi, Zhang Yin) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech LNM Beijing 100190 Peoples R China 2.(Wei Chenxi, Zhang Yin) Univ Chinese Acad Sci Sch Engn Sci Beijing 100049 Peoples R China
推荐引用方式 GB/T 7714	Wei CX,Zhang Y. The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness[J]. RESULTS IN PHYSICS,2023,49:106483.
APA	卫晨曦,&张吟.(2023).The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness.RESULTS IN PHYSICS,49,106483.
MLA	卫晨曦,et al."The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness".RESULTS IN PHYSICS 49(2023):106483.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Jp2023Fa256.pdf（5165KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载