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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张吟 [1]
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2007 [1]
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Source Publication：Journal of Micromechanics and Microengineering
Community：力学所知识产出(1956-2008)
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Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications
期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
Authors:
张吟
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Submit date：2007/06/15
