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Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film 会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao YP
Adobe PDF(867Kb)  |  Favorite  |  View/Download:726/197  |  Submit date:2009/07/23
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion