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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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微重力重点实验室 [1]
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李玉琼 [1]
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Journal ar... [1]
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2010 [1]
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中文 [1]
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光学学报 [1]
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基片材料与沉积参数对薄膜应力的影响
期刊论文
光学学报, 2010, 卷号: 30, 期号: 02, 页码: 602-608
Authors:
李玉琼
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Submit date：2016/07/19
薄膜光学
薄膜应力
哈特曼-夏克传感器
基片材料
沉积参数
离子辅助沉积
