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Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 315-322
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
Adobe PDF(678Kb)  |  Favorite  |  View/Download：870/154  |  Submit date：2009/08/03
Fractal Pattern  Dla  Anodic Bonding  Aluminum Interlayer  Mems  Diffusion-limited Aggregation  Ion Drift Processes  Borosilicate Glass  Depletion  Films  Si  
Analysis of residual stress gradient in MEMS multi-layer structure 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 卷号: 3, 期号: 3-4, 页码: 727-730
Authors:  Qian J(钱劲);  Zhao YP(赵亚溥);  Zhu RC(朱如曾);  Qian, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(156Kb)  |  Favorite  |  View/Download：559/154  |  Submit date：2007/06/15