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Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam 期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 卷号: 21, 期号: 4, 页码: 919-929
Authors:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
View  |  Adobe PDF(568Kb)  |  Favorite  |  View/Download：574/217  |  Submit date：2015/04/28
Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip 期刊论文
Journal of Applied Mechanics-Transactions of the ASME, 2008
Authors:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Adobe PDF(642Kb)  |  Favorite  |  View/Download：1316/361  |  Submit date：2009/08/03
Compressed Elastic Film  Thin-films  Viscous Layer  Wafer Fusion  Stress  Beam  Semiconductors  Technology  Extension  Adhesion