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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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李明军 [1]
高太元 [1]
高智 [1]
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2007 [1]
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中文 [1]
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自然科学进展 [1]
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Source Publication：自然科学进展
Document Type：期刊论文
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CMP润滑方程的Chebyshev加速超松弛法求解
期刊论文
自然科学进展, 2007, 卷号: 17, 期号: 12, 页码: 1724-1728
Authors:
高太元
;
李明军
;
高智
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Submit date：2010/05/03
化学机械抛光
润滑方程
压力分布模型
Chebyshev加速超松弛技术
