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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Source Publication：APPLIED SURFACE SCIENCE
Funding Project：Strategic Priority Research Program of the Chinese Academy of Sciences[XDB22040503]
Community：中国科学院力学研究所
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Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering
期刊论文
APPLIED SURFACE SCIENCE, 2021, 卷号: 564, 页码: 10
Authors:
Xu Y(许亿)
;
Li GD(李国栋)
;
Li G(李光)
;
Gao FY(高方圆)
;
Xia Y(夏原)
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Submit date：2021/08/16
High-entropy alloy nitride films
HiPIMS
Bias voltage
Plasma discharge characteristics
Microstructure
Hardness
