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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张泰华 [1]
杨业敏 [1]
郇勇 [1]
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2006 [1]
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In-plane Load Measuring Technique for the Strength Test of MEMS Micro-cantilever
期刊论文
Chinese Science Bulletin, 2006, 卷号: 51, 期号: 23, 页码: 2819-2823
Authors:
Huan Y(郇勇)
;
Zhang TH(张泰华)
;
Yang YM(杨业敏)
;
Huan, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Submit date：2007/06/15
