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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张吟 [1]
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2008 [1]
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Source Publication：Journal of Applied Mechanics-Transactions of the ASME
Author：张吟
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Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip
期刊论文
Journal of Applied Mechanics-Transactions of the ASME, 2008
Authors:
Zhang Y(张吟)
;
Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
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Submit date：2009/08/03
Compressed Elastic Film
Thin-films
Viscous Layer
Wafer Fusion
Stress
Beam
Semiconductors
Technology
Extension
Adhesion
