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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Li SH [1]
李帅辉 [1]
樊菁 [1]
舒勇华 [1]
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2009 [1]
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Source Publication：Rarefied Gas Dynamics
Creator：李帅辉
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Document Type：会议论文
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A Breakdown Criterion of Free Molecular Flows and an Optimum Analysis of EBPVD
会议论文
26th International Symposium on Rarefied Gas Dynmaics (RGD26), Kyoto, JAPAN, JUN 20-JUL 25, 2008
Authors:
Li SH(李帅辉)
;
Fan J(樊菁)
;
Shu YH(舒勇华)
;
Li SH
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Submit date：2009/07/23
Free Molecular Assumption
Breakdown Criterion
Optimization
Thin Film
Ebpvd
Physical Vapor-deposition
Yttrium
