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Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2022, 卷号: 434, 页码: 10
Authors:  Li Hua;  Luo Yang;  Han Mingyue;  Tang Ling;  Gu Jiabin;  Li GD(李国栋);  Deng Dachen;  Liu Hongtao;  Huang Kai;  Li Liuhe
Adobe PDF(7412Kb)  |  Favorite  |  View/Download:209/55  |  Submit date:2022/05/17
HiPIMS  Shadowing effect  Ion dynamics  2D PIC-MCC