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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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丁桂甫 [1]
周勇 [1]
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2003 [1]
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现代科学仪器 [1]
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Creator：wangli分王莉
Language：中文
Funding Organization：国家重点基础研究发展规划 (973)项目—“集成微光机电系统研究”子项目 (G1 9990 331 0 3)资助
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微桥结构铜膜杨氏模量和残余应力研究
期刊论文
现代科学仪器, 2003, 期号: 4, 页码: 45-48
Authors:
周勇
;
杨春生
;
陈吉安
;
丁桂甫
;
王莉
;
王明军
;
张亚民
;
张泰华
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Submit date：2010/05/03
Cu膜微桥
Mems技术
力学性能
