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硅基MEMS技术 期刊论文
机械强度, 2001, 卷号: 23, 期号: 4, 页码: 523-526
Authors:  郝一龙;  张立宪;  李婷;  张大成
Adobe PDF(307Kb)  |  Favorite  |  View/Download:831/236  |  Submit date:2010/05/03
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