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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
Creator
李元恒 [1]
王振明 [1]
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Journal ar... [1]
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1982 [1]
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中文 [1]
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中国激光 [1]
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Creator：李元恒
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强激光辐照下集成电路Si片的椭圆偏振光研究
期刊论文
中国激光, 1982, 期号: 5, 页码: 82
Authors:
李元恒
;
王振明
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Submit date：2009/08/03
Si片
椭圆偏振光
强激光
辐照时间
激光退火
集成电路
样片
激光辐照
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