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Comparison of Cu thin films deposited on Si substrates with different surfaces and temperatures 期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 276, 页码: 417-423
Authors:  Zhang J(张俊);  Liu C(刘崇);  Fan J(樊菁);  Zhang, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(3091Kb)  |  Favorite  |  View/Download：883/251  |  Submit date：2013/06/27
Copper Thin Film  Deposition And Growth  Molecular Dynamics  Crystalline Structure And Orientation  
稀薄气体动力学:进展与应用 期刊论文
力学进展, 2013, 卷号: 43, 期号: 2, 页码: 185-201
Authors:  樊菁
Adobe PDF(5943Kb)  |  Favorite  |  View/Download：1622/576  |  Submit date：2013/05/03
稀薄气体动力学  分子模拟方法  高超声速飞行器  微电子机械系统  薄膜沉积