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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张吟 [1]
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2007 [1]
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Creator：reprint author
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Creator：张吟
Date Issued：2007
Document Type：期刊论文
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Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications
期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
Authors:
Zhang Y(张吟)
;
Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
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Submit date：2009/08/03
Thin-films
Micromachined Beams
Residual-stress
Cantilever Beam
Stoney Formula
Surface Stress
Strain
Bilayer
Systems
Model
