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Analysis of residual stress gradient in MEMS multi-layer structure 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 卷号: 3, 期号: 3-4, 页码: 727-730
Authors:  Qian J(钱劲);  Zhao YP(赵亚溥);  Zhu RC(朱如曾);  Qian, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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