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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张泰华 [1]
杨业敏 [1]
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Journal ar... [1]
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2002 [1]
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中文 [1]
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现代科学仪器 [1]
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国家自然科学基金资助... [1]
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Funding Organization：国家自然科学基金资助项目 (批准号 :1 0 1 0 2 0 2 1和 1 0 1 72 0 86)
Community：力学所知识产出(1956-2008)
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纳米硬度计及其在微机电系统中的应用
期刊论文
现代科学仪器, 2002, 期号: 1, 页码: 32-37
Authors:
张泰华
;
杨业敏
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Submit date：2010/05/03
微机电系统
纳米压痕
纳米划痕
