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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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李明军 [1]
胡利民 [1]
高太元 [1]
高智 [1]
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2008 [1]
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力学学报 [1]
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Source Publication：力学学报
Creator：高太元
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CMP流场的数值模拟及离心力影响分析
期刊论文
力学学报, 2008, 卷号: 40, 期号: 6, 页码: 729-734
Authors:
高太元
;
李明军
;
胡利民
;
高智
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Submit date：2010/05/03
化学机械抛光
离心力
润滑方程
压力分布
Chebyshev加速超松弛技术
