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Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition 会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁)
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Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation  Sphere Model  Evaporation  
Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum 会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:  Li SH(李帅辉);  Shu YH(舒勇华);  Tang JR(唐锦荣);  Fan J(樊菁);  Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
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