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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
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夏原 [1]
李光 [1]
高方圆 [1]
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2021 [1]
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Creator：高方圆
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Date Issued：2021
Author：李光
Community：先进制造工艺力学实验室
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一种室温溅射制备晶态透明氧化铝薄膜的方法
专利
发明专利. 一种室温溅射制备晶态透明氧化铝薄膜的方法, 专利号: ZL202010227914.7, 申请日期: 2020-03-27, 授权日期: 2021-12-24
Inventors:
夏原
;
高方圆
;
李光
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Submit date：2022/01/14
