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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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Liu CR [1]
Lu XY [1]
Meng QS [1]
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杨振宇 [1]
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2008 [1]
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Creator：Lu XY
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Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum
期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 347-353
Authors:
Liu CR
;
Lu XY
;
Yang ZY(杨振宇)
;
Meng QS
;
Meng, QS (reprint author), Taiyuan Univ Technol, China Educ Minist & Shanxi Provence, Key Lab Adv Mat & Interface Sci, Taiyuan 030024, Peoples R China.
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Submit date：2009/08/03
Anodic Bonding
Mems
Aluminum
Glass
Residual Stress
Finite Element
