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A moving-coil designed micro-mechanics tester with application on MEMS 期刊论文
Measurement Science & Technology, 2007, 卷号: 18, 期号: 11, 页码: 3612-3616
Authors:  Huan Y(郇勇);  Zhang TH(张泰华);  Yang YM(杨业敏);  Zhang, TH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China.
Adobe PDF(557Kb)  |  Favorite  |  View/Download：772/184  |  Submit date：2009/08/03
Micro-mechanics  Tester  Design  Mems  Thin-films  Mechanical-properties  Nanoindentation Technique  
In-plane Load Measuring Technique for the Strength Test of MEMS Micro-cantilever 期刊论文
Chinese Science Bulletin, 2006, 卷号: 51, 期号: 23, 页码: 2819-2823
Authors:  Huan Y(郇勇);  Zhang TH(张泰华);  Yang YM(杨业敏);  Huan, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(738Kb)  |  Favorite  |  View/Download：761/171  |  Submit date：2007/06/15