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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
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夏原 [1]
李光 [1]
高方圆 [1]
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Creator：高方圆
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Funding Organization：International Science & Technology Cooperation Program of China(2014DFG51240)
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Influence of hysteresis effect on properties of reactively sputtered TiAlSiN films
期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 431, 页码: 160-164
Authors:
Gao FY(高方圆)
;
Li G(李光)
;
Xia Y(夏原)
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Submit date：2018/02/08
Tialsin Films
Reactive Sputtering
Hysteresis Effect
Plasma Characteristics
Mechanical Properties
