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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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Jin G [1]
刘丽 [1]
孟永宏 [1]
陈艳艳 [1]
靳刚 [1]
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2008 [1]
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Indexed By：CPCI\-S
Indexed By：EI
Source Publication：Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5
Creator：刘丽
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Date Issued：2008
Author：靳刚
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An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate
会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
Authors:
Meng YH(孟永宏)
;
Chen YY(陈艳艳)
;
Qi C(齐财)
;
Liu L(刘丽)
;
Jin G(靳刚)
;
Jin G
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Submit date：2009/07/23
