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Knowledge Management System of Institue of Mechanics, CAS
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半导体技术 [1]
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4H-SiC贯穿型位错及其密度分布的表征方法优化
期刊论文
半导体技术, 2023, 卷号: 48, 期号: 11, 页码: 977-984
Authors:
章宇
;
陈诺夫
;
张芳
;
余雯静
;
胡文瑞
;
陈吉堃
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Submit date：2024/01/11
SiC
湿法腐蚀
贯穿型位错
位错密度
位错缺陷分布
