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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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唐锦荣 [1]
李帅辉 [1]
樊菁 [1]
舒勇华 [1]
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Journal ar... [1]
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2006 [1]
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中文 [1]
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力学与实践 [1]
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CSCD [1]
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真空辐射加热基片的温度分布
期刊论文
力学与实践, 2006, 卷号: 28, 期号: 3, 页码: 19-23
Authors:
李帅辉
;
舒勇华
;
唐锦荣
;
樊菁
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Submit date：2007/06/15
薄膜气相沉积
真空辐射加热
基片温度分布
