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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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2012 [1]
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第十二届全国MOCV... [1]
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纳米图形蓝宝石衬底上MOCVD外延生长AlN
会议论文
第十二届全国MOCVD学术会议, 中国福建厦门, 2012-04-11
Authors:
董鹏
;
闫建昌
;
吴奎
;
曾建平
;
丛培沛
;
孙莉莉
;
蓝鼎
;
王军喜
;
李晋闽
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Submit date：2014/04/02
Mocvd
蓝宝石衬底
Aln
纳米图形
外延生长
侧向外延
外延层
Ain
纳米级
发光的
微米级
摇摆曲线
形貌
深紫外
原子的
迁移率
位错密度
自组装
紫外固化
反应室
